METHOD FOR MAKING P(VDF-TRFE) COPOLYMER LAYER SENSORS, AND CORRESPONDING SENSOR

摘要

The invention relates to the production of a matrix sensor using a sensitive layer of a P(VDF-TrFE) ferroelectric copolymer deposited on an integrated circuit (0, 12, 13). In order to simplify the manufacture and to enhance yields, the method first comprises depositing onto the integrated circuit a first titanium layer (1 16) and etching the same for forming a matrix network of electrodes electrically connected to the integrated circuit, and then depositing a P(VDF-TrFE) copolymer including a small proportion of about 1 to 10% of a second polymer promoting the adhesion of the P(VDF-TrFE) polymer on the integrated circuit, said polymer being under the P(VDF-TrFE) copolymer or mixed therewith. The copolymer and the adhesion promoter thereof are etched in a single step, and a second conducting layer (120) is then deposited and etched in order to form a counter electrode for the matrix array assembly. The invention can be used in ultrasound image sensors.