| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for separating and recovering a conversion reaction gas, wherein disilicon hexachloride or the like is recovered after trichlorosilane is separated and recovered from a production gas in a conversion reaction process for producing trichlorosilane by reacting hydrogen with silicon tetrachloride discharged from a polycrystalline silicon production process. SOLUTION: In the conversion reaction process for producing trichlorosilane from silicon tetrachloride and gaseous hydrogen, the production gas is cooled to form a condensed liquid and after trichlorosilane and silicon tetrachloride are distilled and separated from the condensed liquid, disilicon hexachloride is distilled and recovered. The conversion reaction process for separating and recovering the conversion reaction gas includes, for example, a first distillation process for distilling trichlorosilane from the condensed liquid, a second distillation process for distilling silicon tetrachloride from residual liquid of the first distillation process, and a third distillation process for distilling disilicon hexachloride from residual liquid of the second distillation process. COPYRIGHT: (C)2009,JPO&INPIT
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