HGH EFFICIENCY INDUCTIVELY COUPLED PLASMA REACTOR

摘要

A high efficiency inductively coupled plasma reactor using a radio frequency antenna is provided to generate and maintain the plasma stably by improving energy transfer efficiency for discharging the plasma by a core cover. A reactor body(21) includes a gas inlet(22) and a gas outlet(23). A discharge space(28) is prepared between the gas inlet and the gas outlet. A first wireless frequency antenna is positioned outside the discharging space and is installed in the reactor body. The first core cover covers the first radio frequency antenna to make a magnetic flux outlet face the discharge space. The radio frequency source supplies the wireless frequency power source to the first radio frequency antenna. The second radio frequency antenna is positioned outside the discharge space and is installed in the reactor body. The second core cover covers the second radio frequency antenna to make the magnetic flux outlet face the discharge space.