发明名称 MEASURING UNIT FOR POSITION OF CRUCIBLE FOR MANUFACTURING SILICON SINGLE CRYSTAL INGOT AND APPARATUS OF MANUFACTURING SILICON SINGLE CRYSTAL INGOT HAVING THE SAME
摘要 A position measuring unit of a crucible for manufacturing a silicon single crystal ingot and a silicon single crystal ingot manufacturing apparatus having the same are provided to manufacture the silicon single crystal ingot with high quality by measuring the position of the crucible accurately. A silicon single crystal ingot manufacturing apparatus(100) includes a chamber, a crucible, a heater, a layer for keeping warm, a cable, and a position measuring unit(160) of the crucible for manufacturing the single crystal ingot. The position measuring unit is coupled with a rotatably installed screw. The position measuring unit measures the position of the crucible lifted when the screw is rotated. The position measuring unit includes an encoder(161), a controller(162), and a display unit. The encoder outputs a signal corresponding to the rotation of the screw when the screw is rotated. The controller receives the signal outputted from the encoder and calculates the position of the crucible based on the signal.
申请公布号 KR20090073349(A) 申请公布日期 2009.07.03
申请号 KR20070141268 申请日期 2007.12.31
申请人 SILTRON INC. 发明人 KIM, WOO TAE;HA, SE GEUN;NOH, TAE SIK
分类号 C30B15/20;C30B15/10;H01L21/20 主分类号 C30B15/20
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