摘要 |
A position measuring unit of a crucible for manufacturing a silicon single crystal ingot and a silicon single crystal ingot manufacturing apparatus having the same are provided to manufacture the silicon single crystal ingot with high quality by measuring the position of the crucible accurately. A silicon single crystal ingot manufacturing apparatus(100) includes a chamber, a crucible, a heater, a layer for keeping warm, a cable, and a position measuring unit(160) of the crucible for manufacturing the single crystal ingot. The position measuring unit is coupled with a rotatably installed screw. The position measuring unit measures the position of the crucible lifted when the screw is rotated. The position measuring unit includes an encoder(161), a controller(162), and a display unit. The encoder outputs a signal corresponding to the rotation of the screw when the screw is rotated. The controller receives the signal outputted from the encoder and calculates the position of the crucible based on the signal.
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