APPARATUS FOR SUPPLYING SOURCE AND METHOD FOR SUPPLYING SOURCE AND APPARATUS FOR DEPOSITIONING THIN FILM

摘要

An apparatus for supplying a raw material and a thin film depositing apparatus are provided to supply a constant amount of powder materials by measuring the weight of the powder material to be supplied to an external device. A storage(100) stores and supplies a powder material. A transfer room(200) includes a supply port and a transfer port. The supply port is connected to the storage and supplies the powder material. The transfer port transfers the powder material to the external device. A loading plate(310) is prepared in the transfer room and the powder material supplied through the supply port is loaded in the loading plate. A driving unit rotates the loading plate to load the powder material loaded in the loading plate. A weight sensor measures the weight of the loaded powder material in the lower part of the loading plate.