| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a multi-wire saw capable of keeping high process quality and preventing breakage of wire by restraining viscosity variation of slurry, dry and solidification of the slurry at an inlet part for inserting the wire in silicon ingot. <P>SOLUTION: This multi-wire saw for cutting a workpiece while supplying slurry to a wire traveling between a plurality of rollers comprises a slurry delivery part for delivering the slurry, a processing chamber for covering at least the slurry delivery part and the workpiece, and a humidity adjusting mechanism for maintaining humidity in the processing chamber at approximate saturated vapor pressure. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
