| 摘要 |
PROBLEM TO BE SOLVED: To provide a method capable of achieving a method of thinning a layer while a substrate to be thinned is combined temporally on a support that is removed easily. SOLUTION: The method includes forming an assembly of the initial substrate (1) with one face (25) of a silicone polymer layer (20), this face having been treated under an ultraviolet radiation, and processing the initial substrate (1) to form the thin layer (5) on the silicone polymer layer (20). COPYRIGHT: (C)2009,JPO&INPIT |
