发明名称 |
SOLID-STATE IMAGING DEVICE, METHOD OF MANUFACTURING THE SAME, AND CAMERA AND ELECTRONIC APPARATUS USING THE SAME |
摘要 |
A method of manufacturing a solid-state imaging device is provided. The method includes: forming an insulating layer extending over an effective pixel region where a plurality of pixels each having a photoelectric conversion element is arranged and a peripheral area adjacent to the effective pixel region; forming an opening in the insulating layer located immediately above the photoelectric conversion element on the effective pixel region; forming a dummy opening in the insulating layer on the peripheral region; and forming a buried layer on the insulating layer to fill the opening and the dummy opening formed in the insulating layer.
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申请公布号 |
US2009166783(A1) |
申请公布日期 |
2009.07.02 |
申请号 |
US20080336140 |
申请日期 |
2008.12.16 |
申请人 |
SONY CORPORATION |
发明人 |
MARUYAMA SHUNSUKE |
分类号 |
H01L31/0352;H01L21/28;H01L27/14;H01L27/146;H04N5/335;H04N5/365;H04N5/369 |
主分类号 |
H01L31/0352 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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