| 摘要 |
In a method of forming a metal line of a semiconductor device, a dielectric film is formed on a semiconductor substrate. A plurality of parallel photoresist patterns are formed over the entire structure including the dielectric film. A spacer is formed on sidewalls of the photoresist patterns. The dielectric film is exposed by removing the photoresist patterns. Damascene patterns are formed by etching the exposed dielectric film. The spacer is removed. Metal material is formed over the entire structure including the damascene patterns and polishing the metal material, thereby forming a metal line.
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