SYSTEM AND METHOD FOR LOADING A TRAY, AND METHOD OF MANUFACTURING SOLAR CELL USING THE SAME

摘要

A system and a method for loading a tray, and a manufacturing method of a solar cell using the same are provided to prevent separation of a tray in a moving direction by forming a twisting prevention device inside a chamber which receives a moving device. A loading system loads a tray(10) in which a plurality of substrates is loaded inside a reaction chamber(40) connected to a slot valve(30). A moving device moves the tray to the slot valve. A sinking prevention device(60a,60b) prevents sinking while the tray is moved. A twisting prevention device(70) prevents twisting while the tray is moved. The sinking prevention device is contacted with a bottom surface of the tray, and includes a first rotation member which supports the tray. The first rotation member is moved between the slot valve and the moving device through a predetermined transfer unit(65).