| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To surely detect the abnormality of a Q-switch in a laser beam machining system using a wavelength conversion element. <P>SOLUTION: A laser beam machining apparatus includes: the Q-switch 19; a wavelength conversion element; a shutter means which is installed on an optical path of a laser beam and which is capable of switching a closed state of shutting off the laser beam and an open state of transmitting the laser beam; an output monitor means for detecting a power of the laser beam outputted from the wavelength conversion element; and an abnormality determination means which shuts off the laser beam by setting the shutter means at a closed state to inhibit laser output outside, which makes the Q-switch 19 to have a predetermined Q-switch frequency so that the wavelength conversion element can output with a laser power of a predetermined value or above, detects a laser power with the output monitor means when the Q-switch 19 is on/off-operated, and determines it is abnormal when the laser power of a predetermined value or above is not detected. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
