MANUFACTURING METHOD OF SEMICONDUCTIVE NANO-WIRE USING INDUCTIVE HEATING AND INDUCTIVE HEATING DEVICE FOR MANUFACTURING SEMICONDUCTIVE NANO-WIRE USING INDUCTIVE HEATING

摘要

A method for forming a semiconductor nano wire using induction heating and an induction heating apparatus for the same are provided to facilitate securing and controlling of a desired temperature condition by performing a local heating and a fast cooling property. An induction coil(10) winds an outer part of a nonconductor pipe. Cooling water flows to an inner part of the induction coil. A conductor(30) is formed inside the nonconductor pipe. A gas input device is formed in one side of the nonconductor pipe. A pumping device(50) is formed in the other side of the nonconductor pipe. A substrate for forming a semiconductor nano wire is arranged on the conductor. At least one among a vessel having a raw material powder and a vessel having a dopant powder is filled is arranged on the conductor. The conductor is locally heated by supplying a power source to the induction coil through a power supply unit.