发明名称 AMORPHOUS CARBON FILM, PROCESS FOR FORMING AMORPHOUS CARBON FILM, CONDUCTIVE MEMBER PROVIDED WITH AMORPHOUS CARBON FILM, AND FUEL CELL SEPARATOR
摘要 The amorphous carbon film of the present invention is an amorphous carbon film comprising carbon and hydrogen, wherein the amorphous carbon film contains not more than 30 atomic % (excluding 0%) of hydrogen and, when the entire amount of the carbon is taken as 100 atomic %, carbon having an sp2 hybrid orbital is present in an amount of not less than 70 atomic % and less than 100 atomic %. Conductivity is imparted to an amorphous carbon film by controlling the contents of hydrogen, Csp3 and the like to increase a structure comprising Csp2. This amorphous carbon film can be formed by plasma CVD using a reaction gas containing one or more gases selected from a carbocyclic compound gas containing carbon having an sp2 hybrid orbital, and a heterocyclic compound gas containing carbon having an sp2 hybrid orbital and silicon and/or nitrogen. By forming the amorphous carbon film on a surface of a substrate, a conductive member can be obtained.
申请公布号 US2009169968(A1) 申请公布日期 2009.07.02
申请号 US20070300179 申请日期 2007.05.22
申请人 KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO 发明人 ISEKI TAKASHI;YAMADA YUKA;NAKANISHI KAZUYUKI;OSHIMA TADASHI;MORI HIROYUKI;HORIE TOSHIO;SUZUKI KEN-ICHI;KITAHARA GAKU
分类号 H01M2/14;B32B9/04;B32B15/04;C09K3/00;C23C16/44;H01M8/02 主分类号 H01M2/14
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