发明名称 STRESS ENGINEERING FOR SRAM STABILITY
摘要 A design structure embodied in a machine readable medium is provided for use in the design, manufacturing, and/or testing of Ics that include at least one SRAM cell. In particular, the present invention provides a design structure of an IC embodied in a machine readable medium, the IC including at least one SRAM cell with a gamma ratio of about 1 or greater. In the present invention, the gamma ratio is increased with degraded pFET device performance. Moreover, in the inventive IC, there is no stress liner boundary present in the SRAM region and ion variation for all devices is reduced as compared to that of a conventional SRAM structure. The present invention provides a design structure of an IC embodied in a machine readable medium, the IC comprising at least one static random access memory cell including at least one nFET and at least one pFET; and a continuous relaxed stressed liner located above and adjoining the at least one nFET and the at least one pFET.
申请公布号 US2009166757(A1) 申请公布日期 2009.07.02
申请号 US20070964879 申请日期 2007.12.27
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION;SAMSUNG ELECTRONICS CO., LTD. 发明人 BAIOCCO CHRISTOPHER V.;CHEN XIANDONG;KO YOUNG G.;SHERONY MELANIE J.
分类号 G06F17/50;H01L27/11 主分类号 G06F17/50
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