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发明名称	APPARATUS FOR HEATING SUBSTRATE
摘要
申请公布号	KR20090006681(U)	申请公布日期	2009.07.02
申请号	KR20070020961U	申请日期	2007.12.28
申请人		发明人
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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