| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing high-purity synthetic silica powder used for a crucible for silicon single crystal pulling and in various semiconductor manufacturing fields with good productivity at a low cost. SOLUTION: The method for producing the synthetic silica powder includes: generating silica slurry by an aqueous solution-based reaction; adding silicon tetrachloride to the silica slurry and causing hydrolysis to form gel containing silica particles; and drying and firing the gel to produce silica powder, wherein, for example, silica slurry having high silica concentration generated by adding silicon tetrachloride to concentrated hydrochloric acid is used or silica slurry having high silica concentration generated by adding silicon tetrachloride to water under vigorous stirring is used. COPYRIGHT: (C)2009,JPO&INPIT
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