发明名称 |
Method, System, and Computer Program Product for Implementing a Direct Measurement Model for an Electronic Circuit Design |
摘要 |
Various embodiments of the present invention are generally directed to a method, system, and computer program product for implementing direct measurement model with simulation and calibration of manufacturing process model in the manufacturing of precision devices such as electronic integrated circuits. The method and the system determine the measured measurement result and the direct measurement information and compare the direct measurement information against the other to determine whether to adjust the process models and the empirical parameters thereof.
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申请公布号 |
US2009172616(A1) |
申请公布日期 |
2009.07.02 |
申请号 |
US20070966979 |
申请日期 |
2007.12.28 |
申请人 |
CADENCE DESIGN SYSTEMS, INC. |
发明人 |
LAPANIK DMITRI |
分类号 |
G06F17/50 |
主分类号 |
G06F17/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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