发明名称 Laser scanning apparatus and laser scanning microscope
摘要 To provide a laser scanning apparatus and a laser scanning microscope capable of securely conducting a condition setting at the time of laser scanning while suppressing a damage on a plane to be irradiated. Accordingly, a laser scanning apparatus includes a light deflecting unit disposed in a light path of laser light directed toward a plane to be scanned, user interfaces through which operational contents of the light deflecting unit are designated by a user, generating units generating driving signals of the light deflecting unit in accordance with the designated operational contents, and testing units test-driving the light deflecting unit with the driving signals while keeping the laser light off and measuring the operational contents of the light deflecting unit during the driving.
申请公布号 US2009168157(A1) 申请公布日期 2009.07.02
申请号 US20080318132 申请日期 2008.12.22
申请人 NIKON CORPORATION 发明人 TSURUMUNE ATSUSHI
分类号 G02B21/06 主分类号 G02B21/06
代理机构 代理人
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