| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for making a device with at least one suspended membrane. SOLUTION: A method for making the device with at least one suspended membrane includes at least the following steps of: forming a trench penetrating a first sacrificial layer and a second layer laminated on the first sacrificial layer and completely surrounding at least part of the first sacrificial layer and at least part of the second layer; filling all or part of the trench with at least one material resisting at least one etching agent; and etching the part of the first sacrificial layer with the etching agent through at least one opening provided in the second layer. The part of the second layer forms at least part of the suspended membrane. COPYRIGHT: (C)2009,JPO&INPIT
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