发明名称 |
IMAGE PICKING-UP DEVICE FOR LENS |
摘要 |
<p>A half-mirror (35) reflects light (L) from a light source, a collimator lens (36) converts the reflected light into parallel light (L1), and the parallel light passes through a lens (1) to be examined. A corner cube prism (49) provided at a rotation reflector (43) recursively reflects the light (L1) passing through the lens (1). When the recursively reflected light (L2) passes through only a non-mark portion of the lens (1), the reflected light diffuses so little that the recursively reflected light becomes a light flux with a small diameter. Because of this, no light loss occurs through an aperture stop (37), and when the light is collected on a CCD (40A), a luminous image is formed. The light (L3) passing through a mark (3C) of the lens (L) so widely diffuses that the light becomes diverged reflection light with a large light flux diameter and a large light loss occurs through the aperture stop (37). Because of this, when the light is collected on the CCD (40A), a dark mark image with low illuminance is formed.</p> |
申请公布号 |
WO2009081928(A1) |
申请公布日期 |
2009.07.02 |
申请号 |
WO2008JP73398 |
申请日期 |
2008.12.24 |
申请人 |
HOYA CORPORATION;GENESIA CORPORATION;TAKEYAMA, NORIHIDE;TANAKA, NORIHISA |
发明人 |
TAKEYAMA, NORIHIDE;TANAKA, NORIHISA |
分类号 |
G01M11/00;G01N21/958;G02C13/00 |
主分类号 |
G01M11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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