发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device whose structure is simplified, wherein the facilitation of manufacturing process is achieved and the production of a warpage in die bonding of a semiconductor chip is controlled. SOLUTION: The semiconductor device includes a semiconductor substrate 1 on whose one surface a plurality of electrodes 5-7 are formed, a low-dielectric-constant highpolymer film 11 where the gate electrode 5 and drain electrode 6 are insulated from the source electrode 7, and which is formed on the gate electrode 5 and drain electrode 6 so as not to cover the source electrode 7, and a chip surface electrode 12 which is formed on the low-dielectric-constant 11 and source electrode 7, and is connected to a ground potential. The ground potential is provided for the source electrode 7 through the chip surface electrode 12. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009147366(A) 申请公布日期 2009.07.02
申请号 JP20090059663 申请日期 2009.03.12
申请人 MITSUBISHI ELECTRIC CORP 发明人 KUNII TETSUO;HATTORI AKIRA;KAWADA KOJI
分类号 H01L21/338;H01L27/095;H01L29/417;H01L29/812 主分类号 H01L21/338
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