发明名称 TRENCH-TYPE SEMICONDUCTOR DEVICE STRUCTURE
摘要 A trench-type semiconductor device structure is disclosed. The structure includes a semiconductor substrate, a gate dielectric layer and a substrate channel structure. The semiconductor substrate includes a trench having an upper portion and a lower portion. The upper portion includes a conductive layer formed therein. The lower portion includes a trench capacitor formed therein. The gate dielectric layer is located between the semiconductor substrate and the conductive layer. The substrate channel structure with openings, adjacent to the trench, is electrically connected to the semiconductor substrate via the openings.
申请公布号 US2009166702(A1) 申请公布日期 2009.07.02
申请号 US20080177756 申请日期 2008.07.22
申请人 NANYA TECHNOLOGY CORP. 发明人 LIN SHIAN-JYH;CHANG MING-CHENG;SHIH NENG TAI;LIAO HUNG-CHANG
分类号 H01L27/108 主分类号 H01L27/108
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