| 摘要 |
An ionizer and a discharge electrode unit embedded in the ionizer are provided to improve a sheath effect to prevent contamination in a leading part of a discharge electrode by shielding the leading part of the discharge electrode with clean gas. A discharge electrode(21) is separately arranged in a thin long case in a long side direction. An inner gas path is installed inside the case and is extended from one end to the other end of the case. A gas outflow path(25) for shielding is in contact with an outer circumference of the discharge electrode and is coaxially extended to the discharge electrode. A gas storage is installed in the outside of the gas outflow path and is coaxially arranged with the gas outflow path for shielding. The gas storage is overlapped with a part of the gas outflow path in a diameter direction. A chamber is coaxial with the discharge electrode between the inner gas path and the gas storage and is extended to a circumference direction. An orifice is interposed between the gas storage and the inner gas path.
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