| 摘要 |
PROBLEM TO BE SOLVED: To achieve adjustment of sensitivity and a range during manufacturing a flux gate sensor without changing the form of a magnetic element. SOLUTION: In a flux gate sensor comprising a thin film magnetic element 1 and a detection coil disposed around or neighboring the thin film magnetic element, and a wiring 2 for supplying current to the thin film magnetic element 1 in a predetermined direction, uniaxial magnetic anisotropy is induced to the thin film magnetic element 1 in a direction oblique to a direction perpendicular to an electrifying direction I of the element. The detection coil is preferably a thin film coil. Upon manufacturing a flux gate sensor, a step for adjusting sensitivity and a range is carried out by adjusting an angleθof the uniaxial magnetic anisotropy with respect to the predetermined direction. COPYRIGHT: (C)2009,JPO&INPIT
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