Quartz crystal resonator element, quartz crystal device, and method for producing quartz crystal resonator element

摘要

An inverted mesa-type quartz crystal resonator element includes a rotated AT-cut quartz crystal substrate, the substrate having edges parallel to each of a Z" axis obtained by rotating a Z' axis in a range of -120° to +60° about a Y' axis and an X' axis perpendicular to the Z" axis when an angle formed by rotating a +Z' axis in a direction of a +X axis about the Y' axis is a positive rotation angle; a thin section that forms a resonating section; and a thick section adjacent to the resonating section, the thin section and the thick section being formed on the quartz crystal substrate by wet etching. The thin section is formed either on a main surface of the substrate corresponding to a +Y'-axis side or on a main surface of the substrate corresponding to a -Y'-axis side.
An amount of residues on the etched surface varies depending on various cutting-out angles because of the anisotropy of the crystallographic orientation of the crystal. The reduction of residues appearing between the thin section, which is the resonating section, and the thick section increases an occupancy of the resonating section. Providing the connection electrode along the direction can suppress influence of stress imposed to the substrate through a support portion. Selected shapes of electrode patterns allow maintaining a defined space of an overlapping region, thereby reducing differences in oscillation characteristics in mass production.