发明名称 |
Crystalline metal film |
摘要 |
<p>A metal film has a cubic crystal structure having a periodic pattern of crystal orientation in a plane. The crystal orientation is gradually rotated about a particular crystal-axis direction (15) such that a {100} plane, a {110} plane, and a {111} plane appear.
</p> |
申请公布号 |
EP1918428(A3) |
申请公布日期 |
2009.07.01 |
申请号 |
EP20070015625 |
申请日期 |
2007.08.08 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
ISHIZAKI, AKEMI;KIMURA, ISAO;OTSUKA, MITSURU |
分类号 |
C30B29/02;C23C14/18;C30B23/02 |
主分类号 |
C30B29/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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