发明名称 Crystalline metal film
摘要 <p>A metal film has a cubic crystal structure having a periodic pattern of crystal orientation in a plane. The crystal orientation is gradually rotated about a particular crystal-axis direction (15) such that a {100} plane, a {110} plane, and a {111} plane appear. </p>
申请公布号 EP1918428(A3) 申请公布日期 2009.07.01
申请号 EP20070015625 申请日期 2007.08.08
申请人 CANON KABUSHIKI KAISHA 发明人 ISHIZAKI, AKEMI;KIMURA, ISAO;OTSUKA, MITSURU
分类号 C30B29/02;C23C14/18;C30B23/02 主分类号 C30B29/02
代理机构 代理人
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