| 摘要 |
A plasma processing apparatus including a remote plasma generator is provided to prevent a peripheral device in a remote plasma generator port and a connection part from being damaged by including a cooling device to cool down the remote plasma generator port. A remote plasma generator(102) receives the gas, generates the radical, and resolve the gas. A remote plasma generator port(112) connects a process chamber(120) and the remote plasma generator. The gas resolved from the remote plasma generator is inputted to the process chamber. A cooling device(110) cools down the heat in the remote plasma generator port when the resolved gas is inputted to the process chamber. The cooling device is installed in an outer surface of the remote plasma generator port between the remote plasma generator and a docking adaptor.
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