| 发明名称 |
Current change limiting device |
| 摘要 |
<p>In a method of limiting the current (I out ) flowing between a plasma chamber (3) and a power supply (2), wherein the current change di/dt is limited if the current exceeds a predetermined current by a by a current change limiting device (7, 40) which is provided in the current path between the power supply (2) and the plasma chamber (3).</p> |
| 申请公布号 |
EP2075823(A1) |
申请公布日期 |
2009.07.01 |
| 申请号 |
EP20070025085 |
申请日期 |
2007.12.24 |
| 申请人 |
HUETTINGER ELECTRONIC SP. Z O. O |
发明人 |
KLIMCZAK, ANDRZEJ;BUGYI, RAFAL;OZIMEK, PAWEL |
| 分类号 |
H01J37/34;H02H9/02 |
主分类号 |
H01J37/34 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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