发明名称 BAKE APPARATUS
摘要 A bake apparatus is provided to prevent the change of heating and cooling temperatures of a cooling plate and a heating plate by including a heat blocking plate between the cooling plate and the heating plate. A housing(10) provides a space for performing a bake process inside. A cooling plate(20) and a heating plate(30) are installed inside a housing. A heat exhaust member(130) exhausts the heat air current to the outside of the housing. A support block(110) is installed to surround the side surface of the cooling plate and the heating plate. A transfer unit(40) is installed in one side of the support block and transfers the substrate between the heating plate and the cooling plate. The heat exhaust member is arranged between the transfer unit and the support block.
申请公布号 KR20090070566(A) 申请公布日期 2009.07.01
申请号 KR20070138613 申请日期 2007.12.27
申请人 SEMES CO., LTD. 发明人 KANG, UN KYU;HAM, HYUNG WON;KIM, SUNG UN
分类号 H01L21/324;H01L21/02 主分类号 H01L21/324
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