PROCESS FOR PREPARING MATRIX LATTICES OF MICROCELLS ON A GLASS SUBSTRATE

摘要

The invention relates to a process for preparing matrix lattices of microcells on a glass substrate, to be used in medical and pharmaceutical applications as a textured support for studying the biological material by optical microscopy. A substrate (1) consisting of Corning-type borosilicate glass is coated on one face, by high vacuum deposition, with a double masking coating (B) consisting of a first 15 nm-thick Cr substrate (2) and a second 100 nm-thick Au substrate (3), the vacuum deposition being followed by a stage (C) of laying out by centrifugation with a usual positive photoresist material (4) and a stage (F) of etching the metals which form the Cr and Au substrates (2) and (3).