发明名称 INTEGRATED CIRCUIT AND METHOD OF FABRICATION THEREOF
摘要 <p>A method of forming an integrated circuit structure comprising the steps of forming a first and second device region on a surface of a wafer, forming a spacer of a first width on a sidewall of a first gate stack in the first device region, forming a spacer of a second width on a sidewall of a second gate stack in the second device region, with the first width being different from the second width.</p>
申请公布号 SG153008(A1) 申请公布日期 2009.06.29
申请号 SG20080083438 申请日期 2008.11.11
申请人 CHARTERED SEMICONDUCTOR MANUFACTURING, LTD. 发明人 JINPING LIU;HAI CONG;BINBIN ZHOU;KH ALEX SEE;SHENG ZHOU MEI;CHOO HSIA LIANG
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