| 摘要 |
An isolator and a manufacturing method thereof are provided to protect the isolator from impulses due to ESD and surge and improve reliability by forming a protecting element and a transformer simultaneously at a silicon wafer having locally formed highly resistive silicon wafer and oxide film. An isolator includes a silicon wafer(110), a protecting element and a transformer. The silicon wafer is a highly resistive silicon wafer. The protecting element is formed at a predetermined region of the silicon wafer. The transformer is formed at a predetermined region of the silicon wafer. The transformer has two coil patterns(150,180) separated from each other. |
