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发明名称
Fabricating method of Semiconductor device
摘要
申请公布号
KR100905177(B1)
申请公布日期
2009.06.29
申请号
KR20020065561
申请日期
2002.10.25
申请人
发明人
分类号
H01L21/334;(IPC1-7):H01L21/334
主分类号
H01L21/334
代理机构
代理人
主权项
地址
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