发明名称 CONTACT OF ELECTRO STATIC DISCHARGE DEVICE AND SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF CONTACT FOR ELECTRO STATIC DISCHARGE DEVICE AND SEMICONDUCTOR DEVICE
摘要 <p>A method for forming a contact of an electrostatic discharge device and a semiconductor device and a method for manufacturing the same are provided to reduce a manufacturing cost and to maximize productivity by forming simultaneously a normal contact and a blanket contact. A P-type well layer, an N-type well layer, an N+ region, and a P+ region are formed on a left active region(A) of a single crystalline silicon substrate(105). A first polygate(110) are formed on the single crystalline silicon substrate. A first gate insulating layer(112) is formed between the first poly gate and the single crystalline silicon substrate. A source region, a drain region, and a channel region are formed on a right active region(B) of the single crystalline silicon substrate. A second poly gate(120) is formed on the single crystalline silicon substrate. A second gate insulating layer(122) is formed between the second poly gate and the single crystalline silicon substrate. A PMD(Polysilicon Metal Dielectric) layer(140) is formed on the single crystalline silicon substrate.</p>
申请公布号 KR20090068562(A) 申请公布日期 2009.06.29
申请号 KR20070136238 申请日期 2007.12.24
申请人 DONGBU HITEK CO., LTD. 发明人 LEE, WHAN KI
分类号 H01L21/28;H01L29/78 主分类号 H01L21/28
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