| 摘要 |
A spacer wafer (1) for a wafer stack (8) includes a spacer body (10) with a first surface (11) and a second surface (12), and is intended to be sandwiched between a first wafer (6) and a second wafer (7). That is, the spacer (1) is to keep a first wafer (6) placed against the first surface (11) and a second wafer (7) placed against the second surface (12) at a constant distance from each other. The spacer (1) provides openings (13) arranged such that functional elements (9) of the first wafer (6) and of the second wafer (7) can be aligned with the openings. The spacer (1) is formed from a forming tool (2) by means of a shape replication process and is preferably made of a material hardened by curing. In a preferred embodiment, at least one of the first and second surface (11, 12) has edges (15) separating the surface (11, 12) from the openings (13), and the thickness of the spacer wafer (1) at the edges (15) exceeds the thickness of the spacer wafer (1) at surface locations around the edges (15).
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