LIFE PREDICTION METHOD OF HEATER WIRE, HEAT TREATMENT DEVICE, RECORD MEDIUM, LIFE PREDICTION PROCESSING SYSTEM OF HEATER WIRE

摘要

PROBLEM TO BE SOLVED: To provide a life prediction method or the like of a heater wire in which the lifetime of the heater wire is predicted more precisely and at an earlier timing, when its lifetime is predicted before the heater wire used in a heat treatment device is disconnected. SOLUTION: While temperature control by each heater wire is carried out, in a substrate transfer period when carrying in a wafer boat 114 from the lower end aperture 123, the data of the maximum value of the temperature detected from the heater wire 132E nearest the lower end aperture 123 are collected. Then, the maximum value data of the heater wire temperature in the substrate transfer period which are collected at each time the wafer boat is carried in are monitored. When the maximum value is determined to have shifted higher than a prescribed temperature or more, an alarm treatment to notify that the end of lifetime of the heater wire is close at hand is carried out. COPYRIGHT: (C)2009,JPO&INPIT