| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To sharply reduce processing stop accompanied with the abnormality of a manufacturing device, and to reduce the sampling frequency of inspection, and to improve the yield of a semiconductor device. <P>SOLUTION: An abnormality detection system 4 compares the lot processing information of a manufacturing device 6 input through a production control system 2 with decision information preliminarily stored in an abnormality detection system 4, and when the processing information is abnormal, the abnormality detection system 4 outputs abnormal information to a flexible inspection device 5. The flexible inspection system 5 outputs the inspection instruction of the lot whose abnormality has been detected to the production control system 2. The production control system 2 instructs inspection to the inspection device 3 when the inspection object lot arrives at the inspection device 3, and the inspection device 3 performs inspection. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
