| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method capable of cleaning the exhaust air from a clean room and the like, and continuously circulating and supplying the same to the clean room and the like for a long period. <P>SOLUTION: In preparing the air of ultrahigh purity from the exhaust air as the process air from a temperature/humidity conditioned-clean work space, and circulating and supplying the same to the clean work space, this method of preparing the air of ultrahigh purity from the clean room exhaust air comprises taking the process air into a batch-wise temperature swing adsorbing device, and allowing the process air to pass through a temperature/humidity conditioning device, or taking the process air in the temperature/humidity conditioning device, and allowing the process air to pass to the batch-wise temperature swing adsorbing device. This method of preparing the air of ultrahigh purity comprises two systems arranged in parallel with each other, that is, a system of an adsorbing material unit in an adsorption mode for removing molecular contaminants by an adsorbing material, and a system of an adsorbing material unit in a regeneration mode for allowing the air of ultrahigh purity passed through the adsorbing material unit in the adsorption mode, to flow into a distributor to be branched, and allowing the branched air to pass to the adsorbing material unit adsorbing the molecular contaminants as the regeneration air. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
