| 摘要 |
PROBLEM TO BE SOLVED: To provide a simple alignment system of a layout configuration. SOLUTION: A panel alignment system has constitution in which a load-lock chamber, a deaerating chamber and a panel alignment chamber are arranged linearly, gate valves are provided between the respective chambers, a storing mechanism accumulating a plurality of sheets of lower substrates is provided in the deaerating chamber, upper substrates to be aligned are carried in to the panel alignment chamber by a carrying-in robot and held on an upper table, the panel alignment chamber is provided with a gate valve for receiving the products after being subjected to the alignment from a lower table and taking out the products, the lower substrates with liquid crystal dropped thereon are carried in to the load-lock chamber, and carried in to the deaerating chamber by a conveyor. The lower substrates are then conveyed in order of being carried in to the deaerating chamber into the panel alignment chamber by the conveyor. COPYRIGHT: (C)2009,JPO&INPIT
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