| 摘要 |
PROBLEM TO BE SOLVED: To execute emission analysis by setting an appropriate number of analysis parts at appropriate positions in accordance with a type of a sample and an analysis objective. SOLUTION: A plurality of extraction algorithms A-D different in the number of analysis parts set on an analysis surface of a sample, an initial position, an avoiding method when a defective part is present, and the like are previously stored in an extraction information storage part 22. When an operator inputs the extraction algorithm used for the analysis of samples by relating it to sample numbers provided to the respective samples before continuous analysis, this information is kept in a selection information storage part 24. When the sample 6 is given in executing the analysis, a sample identification part 18 recognizes the sample number thereof, an image processing part 21 detects a defective part by the image of the analysis surface of the sample 6 obtained by a CCD camera 12. An analysis part extraction processing part 22 reads the extraction algorithm corresponding to the sample number, and extracts one or more analysis parts according to the algorithm and to avoid the defective part. COPYRIGHT: (C)2009,JPO&INPIT
|
