MICROCANTILEVER HEATER THERMOMETER WITH INTEGRATED TEMPERATURE-COMPENSATED STRAIN SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a microcantilever hotplate device which incorporates a temperature compensating strain sensor. SOLUTION: This microcantilever hotplate device comprises a microcantilever having a temperature compensating strain sensor and a resistive heater. This invention also provides methods for using a microcantilever hotplate for temperature compensated surface stress measurements, chemical/biochemical sensing, measuring various properties of compounds adhered to the microcantilever hotplate surface, or for temperature compensated deflection measurements. COPYRIGHT: (C)2009,JPO&INPIT