| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for recovering a minute particle and an apparatus therefor by which a backward flow of the minute particle can be prevented without deteriorating the minute particle when a liquid sending pump is disconnected from a flow passage. SOLUTION: When a liquid comprising minute particles 10a, 10b is made to flow through the flow passage formed on a substrate 1 and the target minute particle 10a is separated and recovered, the minute particle 10a and the minute particle 10b are separated from each other and stored respectively in a recovery liquid storage part 4 and in a waste liquid storage part 5 in a minute particle separation/acquisition part 13 on the basis of the result discriminated by an optical detection part 12. Before the liquid sending pump is disconnected from the flow passage, a part of the flow passage communicated with the recovery fluid storage part 4 is irradiated with a laser beam to deform the flow passage and reduce a diameter of the flow passage. COPYRIGHT: (C)2009,JPO&INPIT
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