CAPACITOR AND METHOD FOR FABRICATION OF THE SAME

摘要

A capacitor and a manufacturing method thereof are provided to improve reliability of a capacitor by preventing a leaning effect of a lower electrode. A capacitor is made of a bottom electrode(100), a dielectric layer, an upper electrode, and a capacitor. A lower region(11) of a bottom electrode is thicker than an upper region(12) of the bottom electrode. The bottom electrode has a cylindrical structure. The bottom electrode has different levels of thickness. The lower region is heavier than the upper region. A dielectric layer is formed on the bottom electrode. A top electrode is formed on the dielectric layer.