| 摘要 |
<p>A polymer containing cyclic anhydride and an organic anti-reflective coating film composition employing the same are provided to show excellent light-absorbing properties, thereby preventing standing wave, notching and undercutting phenomena. A polymer containing cyclic anhydride is composed of repeat units represented by the formula 1. The weight-average molecular weight of the polymer containing cyclic anhydride is 5000~50000 g/mol. The polymer containing cyclic anhydride represents the formula 2. In the formula 2, R1, R2 and R3 are independently hydrogen or methyl groups; R4 is hydrogen or C1-C6 alkyl group; R5 is hydroxyl group, a benzene group which is substituted or non-substituted with C1-C4 alkyl group, naphthalene group, anthracene group, naphthacene group or anthracenyl benzyl group; R 6 is hydroxyl, glycidyl, epoxy or amine group; and m is an integer of 0 to 6. An organic anti-reflective coating film composition contains 0.1-30wt% of the polymer and 70-99.9wt% of solvent.</p> |
