| 摘要 |
<p>A photomask mounting/housing device, a resist inspecting method using the same, and a resist inspection apparatus using the same are provided to maintain performance of an optic system by preventing leakage of gas to the outside. A photomask mounting/housing device includes a plurality of frame bodies and a light-transmitting protection member. Each of the frame bodies includes a concave part and a cavity part(9h,10h). The concave part is formed to receive the photomask. The concave part is formed to house the photomask. The cavity part is formed within the concave part. At least, a resist forming region of the photomask is inserted into the cavity part. The light-transmitting protection member is arranged at the outside of the cavity part of the frame body. A sealed space is formed to oppose the resist and to be separated from the resist.</p> |
