| 摘要 |
PROBLEM TO BE SOLVED: To provide a method or the like of manufacturing an oscillation body structure body by which defect production rate is reduced, an adjustment process for adjusting the oscillation body is dispensed with or the number of processes or their contents are reduced. SOLUTION: The oscillation body structure body is manufactured by the method of manufacturing including a forming process and a selection process. In the forming process, an elastic supporting part 110, a first oscillation body candidate part 111a which is a first candidate of the oscillation body and a second oscillation body candidate part 111b which is a second candidate of the oscillation body which are respectively connected to the both ends of the elastic supporting body 110 are formed. In the selection process, either one of the first oscillation body candidate part 111a and the second oscillation body candidate part 111b is selected as the oscillation body 112. In the forming process, the first oscillation body candidate part and the second oscillation body candidate part may be designed and formed in a same shape or a substantially in a same shape. COPYRIGHT: (C)2009,JPO&INPIT
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