| 摘要 |
Provided are an illuminating optical system which illuminates a sample, an illumination-side pupil modulating device which is arranged on a side of the illuminating optical system, an illumination-side turret which holds the illumination-side pupil modulating device, an illumination-side-turret revolving mechanism which revolves the illumination-side turret to move the illumination-side pupil modulating device along an orbital circumference on a plane perpendicular to an optical axis, a relaying optical system which relays a pupil of an objective lens; an imaging-side pupil modulating device which is arranged on a side of the relaying optical system, an imaging-side turret which holds the imaging-side pupil modulating device, and an imaging-side-turret revolving mechanism which revolves the imaging-side turret to move the imaging-side pupil modulating device along the orbital circumference on a plane perpendicular to the optical axis.
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