METHOD OF MEASURING SURFACE SHAPE USING MOIRE TECHNIQUE

摘要

A surface shape measuring method using moire technique is provided to form an oxide film in the surface of a shape measurement object and improve the sharpness of a lattice pattern projected to the surface, thereby obtaining a clear moire pattern. An oxide film is formed on the surface of a shape measurement object(S11). A lattice pattern is projected to the shape measurement object in a collimated light state(S12). A lattice pattern image projected to the shape measurement object is detected by the projection of the lattice pattern(S13). A virtual lattice pattern having the same interval and a different angle compared with the lattice pattern is produced. A moire pattern is formed by overlapping the virtual lattice image over the lattice pattern image projected onto the shape measurement object(S14).