发明名称 System and method for characterizing a textured surface
摘要 A textured surface characterization system ( 100 ) includes a characterization apparatus ( 110 ) that contacts a textured surface ( 104 ) of an item ( 108 ) in order to characterize that surface. The characterization system includes a fluid delivery system ( 204 ) for flowing a fluid ( 128 ) across the textured surface when the textured surface is in contact with the characterization apparatus. Pressure measurement structures ( 144, 160 ) on the characterization apparatus provide pressure data for the fluid as it flows across the textured surface. This pressure data is used to characterize the textured surface.
申请公布号 US6986284(B2) 申请公布日期 2006.01.17
申请号 US20030652173 申请日期 2003.08.29
申请人 ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC. 发明人 MULDOWNEY GREGORY P.
分类号 B24B37/00;G01L7/00;B24B37/04;H01L21/304 主分类号 B24B37/00
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