发明名称 |
System and method for characterizing a textured surface |
摘要 |
A textured surface characterization system ( 100 ) includes a characterization apparatus ( 110 ) that contacts a textured surface ( 104 ) of an item ( 108 ) in order to characterize that surface. The characterization system includes a fluid delivery system ( 204 ) for flowing a fluid ( 128 ) across the textured surface when the textured surface is in contact with the characterization apparatus. Pressure measurement structures ( 144, 160 ) on the characterization apparatus provide pressure data for the fluid as it flows across the textured surface. This pressure data is used to characterize the textured surface.
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申请公布号 |
US6986284(B2) |
申请公布日期 |
2006.01.17 |
申请号 |
US20030652173 |
申请日期 |
2003.08.29 |
申请人 |
ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC. |
发明人 |
MULDOWNEY GREGORY P. |
分类号 |
B24B37/00;G01L7/00;B24B37/04;H01L21/304 |
主分类号 |
B24B37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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