CLUSTER TOOL AND METHOD FOR CONTROLLING TRANSPORT,申请号EP20020707288-传众专利搜索

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发明名称	CLUSTER TOOL AND METHOD FOR CONTROLLING TRANSPORT
摘要
申请公布号	EP1394849(A4)	申请公布日期	2009.06.24
申请号	EP20020707288	申请日期	2002.04.02
申请人	TOKYO ELECTRON LIMITED	发明人	IIJIMA, KIYOHITO;KAISE, SEIICHI;TAKAHASHI, KEIKO;OBI, AKIRA
分类号	H01L21/00;H01L21/677	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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